Algorithms for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation.

Content Provider	Europe PMC
Author	Villarrubia, J. S.
Copyright Year	1997
Abstract	To the extent that tips are not perfectly sharp, images produced by scanned probe microscopies (SPM) such as atomic force microscopy and scanning tunneling microscopy are only approximations of the specimen surface. Tip-induced distortions are significant whenever the specimen contains features with aspect ratios comparable to the tip’s. Treatment of the tip-surface interaction as a simple geometrical exclusion allows calculation of many quantities important for SPM dimensional metrology. Algorithms for many of these are provided here, including the following: (1) calculating an image given a specimen and a tip (dilation), (2) reconstructing the specimen surface given its image and the tip (erosion), (3) reconstructing the tip shape from the image of a known “tip characterizer” (erosion again), and (4) estimating the tip shape from an image of an unknown tip characterizer (blind reconstruction). Blind reconstruction, previously demonstrated only for simulated noiseless images, is here extended to images with noise or other experimental artifacts. The main body of the paper serves as a programmer’s and user’s guide. It includes theoretical background for all of the algorithms, detailed discussion of some algorithmic problems of interest to programmers, and practical recommendations for users.
ISSN	1044677X
Journal	Journal of Research of the National Institute of Standards and Technology
Volume Number	102
PubMed Central reference number	PMC4882144
Issue Number	4
PubMed reference number	27805154
e-ISSN	21657254
DOI	10.6028/jres.102.030
Language	English
Publisher	[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
Publisher Date	1997-07-01
Access Restriction	Open
Rights License	The Journal of Research of the National Institute of Standards and Technology is a publication of the U.S. Government. The papers are in the public domain and are not subject to copyright in the United States. Articles from J Res may contain photographs or illustrations copyrighted by other commercial organizations or individuals that may not be used without obtaining prior approval from the holder of the copyright.
Subject Keyword	algorithms atomic force microscopy blind reconstruction dimensional metrology image simulation mathematical morphology scanned probe microscopy scanning tunneling microscopy surface reconstruction tip artifacts tip estimation
Content Type	Text
Resource Type	Article
Subject	Engineering