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Optical and microstructural properties of ZnO/TiO2 nanolaminates prepared by atomic layer deposition.
| Content Provider | Europe PMC |
|---|---|
| Author | Gu, Yu-Zhu Lu, Hong-Liang Geng, Yang Ye, Zhi-Yuan Zhang, Yuan Sun, Qing-Qing Ding, Shi-Jin Zhang, David Wei |
| Copyright Year | 2013 |
| Abstract | ZnO/TiO2 nanolaminates were grown on Si (100) and quartz substrates by atomic layer deposition at 200°C using diethylzinc, titanium isopropoxide, and deionized water as precursors. All prepared multilayers are nominally 50 nm thick with a varying number of alternating TiO2 and ZnO layers. Sample thickness and ellipsometric spectra were measured using a spectroscopic ellipsometer, and the parameters determined by computer simulation matched with the experimental results well. The effect of nanolaminate structure on the optical transmittance is investigated using an ultraviolet–visible-near-infrared spectrometer. The data from X-ray diffraction spectra suggest that layer growth appears to be substrate sensitive and film thickness also has an influence on the crystallization of films. High-resolution transmission electron microscopy images show clear lattice spacing of ZnO in nanolaminates, indicating that ZnO layers are polycrystalline with preferred (002) orientation while TiO2 layers are amorphous. |
| ISSN | 19317573 |
| Journal | Nanoscale Research Letters |
| Volume Number | 8 |
| PubMed Central reference number | PMC3599444 |
| Issue Number | 1 |
| PubMed reference number | 23442741 |
| e-ISSN | 1556276X |
| DOI | 10.1186/1556-276x-8-107 |
| Language | English |
| Publisher | Springer |
| Publisher Date | 2013-02-27 |
| Access Restriction | Open |
| Rights License | This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. Copyright ©2013 Gu et al; licensee Springer. |
| Subject Keyword | ZnO/TiO2 nanolaminates ALD Transmittance HRTEM |
| Content Type | Text |
| Resource Type | Article |
| Subject | Nanoscience and Nanotechnology Condensed Matter Physics Materials Science |