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Copolymerization of Parylene C and Parylene F to Enhance Adhesion and Thermal Stability without Coating Performance Degradation.
| Content Provider | Europe PMC |
|---|---|
| Author | Xu, Han Yang, Zhou Guo, Yechang Xu, Qingmei Dou, Songtao Zhang, Pan Jin, Yufeng Kang, Jiajie Wang, Wei |
| Editor | Dmitrenko, Mariia E. Penkova, Anastasia V. Zou, Lusi |
| Copyright Year | 2023 |
| Abstract | Parylene C has been widely used in the fields of microelectromechanical systems (MEMS) and electronic device encapsulation because of its unique properties, such as biocompatibility and conformal coverage. However, its poor adhesion and low thermal stability limit its use in a wider range of applications. This study proposes a novel method for improving the thermal stability and enhancing the adhesion between Parylene and Si by copolymerizing Parylene C with Parylene F. The successful preparation of Parylene copolymer films containing different ratios of Parylene C and Parylene F was confirmed using Fourier-transform infrared spectroscopy and surface energy calculations. The proposed method resulted in the copolymer film having an adhesion 10.4 times stronger than that of the Parylene C homopolymer film. Furthermore, the friction coefficients and cell culture capability of the Parylene copolymer films were tested. The results indicated no degradation compared with the Parylene C homopolymer film. This copolymerization method significantly expands the applications of Parylene materials. |
| Journal | Polymers |
| Volume Number | 15 |
| PubMed Central reference number | PMC10007139 |
| Issue Number | 5 |
| PubMed reference number | 36904490 |
| e-ISSN | 20734360 |
| DOI | 10.3390/polym15051249 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2023-02-28 |
| Access Restriction | Open |
| Rights License | Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). © 2023 by the authors. |
| Subject Keyword | Parylene copolymerization adhesion enhancement thermal stability coating performance |
| Content Type | Text |
| Resource Type | Article |
| Subject | Chemistry Polymers and Plastics |