Loading...
Please wait, while we are loading the content...
Similar Documents
Self-sputtering of an inverted cylindrical magnetron for ion beam generation
| Content Provider | eScholarship Repository: University of California |
|---|---|
| Author | Oks, Efim |
| Abstract | The self-sputtering mode in high power pulsed magnetron discharges opens the possibility of generating plasma that contains mainly singly charged metal ions of the target (cathode) material. The main idea of a self-sputtering magnetron ion source is to utilize the dense plasma to extract ions from it and thus to form a beam of accelerated, purely singly charged metal ions. Such kind of metal ion source based on a planar magnetron has been reported in our previous, recent publication. The present paper describes the special features observed for the self-sputtering mode of an "inverted" cylindrical magnetron configuration formed by two coaxial cylindrical electrodes. This geometry appears attractive for a novel ion source design and its applications. |
| File Format | |
| Alternate Webpage(s) | https://escholarship.org/uc/item/9fz127tc |
| Language | English |
| Publisher Date | 2010-09-19 |
| Access Restriction | Open |
| Subject Keyword | High Power Impulse Magnetron Sputtering Ion Source Plasma physics and fusion |
| Content Type | Text |
| Resource Type | Article |
