NDLI: Hall effect sensors integrated in standard technology and optimized with on-chip circuitry

Content Provider	EDP Sciences
Author	J.-B. Kammerer L. Hébrard V. Frick P. Poure F. Braun
Abstract	While silicon is not the best semi-conductor material to design Hall effect sensors, it is widely used because Hall devices are fully compatible with standard processes such as CMOS or Bi-CMOS. Hall effect sensors can thus take advantage of on-chip circuitry to counterbalance the poor intrinsic metrological characteristics of silicon Hall devices, and low cost integrated smart magnetometers can be designed using standard technologies. Conventional Hall plate as well as the spinning-current method, which is the present state of the art technique to improve performances of integrated Hall devices, are reviewed in this paper. Then a new multi-strips Hall device and its specific biasing circuit are introduced. This new device allows to multiply by n the absolute sensitivity of the Hall sensor where n is the number of strips, but it suffers from offset. To overcome this drawback, a Hall sensors network which also allows to increase the sensitivity while reducing the offset is proposed. Finally a comparison between the Hall sensors network and the spinning-current is done, showing that both techniques are complementary and should be combined to design high resolution Hall sensor systems.
Ending Page	64
Starting Page	49
Page Count	16
File Format	HTM / HTML PDF
ISSN	12860042
Alternate Webpage(s)	https://www.epjap.org/articles/epjap/abs/2006/10/ap05052/ap05052.html
e-ISSN	12860050
Issue Number	1
Journal	The European Physical Journal Applied Physics
Volume Number	36
DOI	10.1051/epjap:2006100
Language	English
Publisher	EDP Sciences
Publisher Date	2006-10-01
Access Restriction	Subscribed
Rights Holder	© EDP Sciences, 2006
Subject Keyword	Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing Bulk semiconductor and conductivity oscillation devices (including Hall effect devices, space-charge-limited devices, and Gunn effect devices) Microcircuit quality, noise, performance, and failure analysis
Content Type	Text
Resource Type	Article
Subject	Instrumentation Condensed Matter Physics Electronic, Optical and Magnetic Materials

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