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Electrical/Optical Properties of Thin Transparent Oxide Films Deposited Using DC Magnetron Sputtering.
| Content Provider | CiteSeerX |
|---|---|
| Author | Kim, Sung-Moon Pyo, Young-Sin Kim, Young-Hwan So, Byung-Soo Hwang, Jin-Ha |
| Abstract | Abstract. Amorphous indium tin oxide (ITO) thin films were grown on plastic substrates, PES (polyethersulfone) using low temperature DC magnetron sputtering. Various post-annealing techniques are attempted to optimize conductivity, transmittance, and roughness: i) conventional thermal annealing, ii) excimer laser annealing, and iii) UV irradiation. The electrical/optical properties were measured using Hall-measurement, DC 4-point resistance measurement, and UV spectrometry along with micro-structural characterization. Optimized UV treatment exhibits enhanced conductivity and smooth surface, compared to those of conventional thermal annealing and excimer laser annealing. |
| File Format | |
| Access Restriction | Open |
| Content Type | Text |