Loading...
Please wait, while we are loading the content...
Similar Documents
ELECTROSTATICALLY-ACTUATED MICRO CANTILEVERS FOR ELECTRO-MECHANICAL MEASUREMENT OF SINGLE-WALLED CARBON NANOTUBES GROWN BY CATALYTIC CVD
| Content Provider | CiteSeerX |
|---|---|
| Author | Hoshino, Kazunori Murakami, Yoichi Maruyama, Shigeo Matsumoto, Kiyoshi Shimoyama, Isao |
| Abstract | We have build a system for real-time in-situ measurement of electromechanical properties of single-walled carbon nanotubes (SWNTs) growing between electrostatically actuated silicon cantilevers faced each other with a micrometer-order gap. Our catalytic CVD method using ethanol as a carbon source was employed along with a newly developed technique that can synthesize SWNTs directly on the surface of Si substrate at the CVD temperature of as low as 650 °C. SWNTs were successfully grown between the 10-micrometer gap of the measuring probes. Mechanical properties of the probing cantilevers under the CVD condition were then measured to assess the feasibility of real-time measurement of SWNT growth. 1. |
| File Format | |
| Access Restriction | Open |
| Subject Keyword | Electrostatically-actuated Micro Cantilever Electro-mechanical Measurement Mechanical Property Cvd Temperature Single-walled Carbon Nanotube 10-micrometer Gap Micrometer-order Gap Cvd Condition Catalytic Cvd Method Electromechanical Property Si Substrate Silicon Cantilever Real-time Measurement Real-time In-situ Measurement Swnt Growth Measuring Probe Carbon Source |
| Content Type | Text |
