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CHARACTERIZATION OF PULSED DC NITROGEN PLASMA USING OPTICAL EMISSION SPECTROSCOPY AND LANGMUIR PROBE (2014)
| Content Provider | CiteSeerX |
|---|---|
| Author | Shaw, M. S. Ahmad, R. Ikhlaq, U. Saleem, S. |
| Abstract | ABSTRACT: Nitrogen plasmas are generated by cost-effective 100 'Hz pulsed de electric power souse. Active species of nitrogen in plasma play key role in surface treatment Optical emission spectroscopy and Langmuir probe are used to measure the plasma parameters. Measurements are carried out for various pressures (1, 1.5,2 and 2.5 mbar) and powers (25, 50, 75 and 100 W). Optical spectra collected within the span range 300-900 nm. Electron temperature and electron density are evaluated by using intensity ratio of two atomic nitrogen lines (746.8 nm and 869.1 nm) and full width at half maximum (FWHM) of a Stark broadened line (746.8 nm) respectively. Langmuir probe is also used for determination of electron temperature, density, flux and velocity in plasma. It is found that value of these parameters decreases with increase of filling pressure and increases with source power. It is also found that more energetic electrons are produced at 1 mbar pressure for 100 W power and thus are responsible for enhanced plasma-reaction with surface treatment |
| File Format | |
| Publisher Date | 2014-01-01 |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
