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2D PIC/MCC Simulations of Geometrically and Electrically Asymmetric CCP Discharges on a GPU
| Content Provider | CiteSeerX |
|---|---|
| Author | Eremin, D. Schulze, J. Czarnetzki, U. Brinkmann, R. P. Mussenbrock, T. |
| Abstract | The recently discovered electrical asymmetry effect (EAE) in CCP discharges, where a DC self-bias is generated by driving a discharge with several phase-shifted even harmonics of the fundamental frequency, has been studied for a realistic 2D axisymmetric cylindrical geometry with different electrode areas, i.e. possessing geometrical asymmetry. The simultaneous action of electrical and geometrical asymmetries determines the resulting DC self-bias and provides an additional level of flexibility for controlling the energy distribution function of ions impinging on the electrodes. In this work we investigate such discharges using an electrostatic implicit 2D PIC/MCC code massively parallelized on a graphics processing unit (GPU). 1. |
| File Format | |
| Access Restriction | Open |
| Subject Keyword | Pic Mcc Simulation Electrically Asymmetric Ccp Discharge Geometrical Asymmetry Electrical Asymmetry Effect Electrostatic Implicit Energy Distribution Function Different Electrode Area Ccp Discharge Additional Level Axisymmetric Cylindrical Geometry Pic Mcc Code Dc Self-bias Simultaneous Action Fundamental Frequency |
| Content Type | Text |
