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High-Q fused silica birdbath and hemispherical 3-D resonators made by blow torch molding
| Content Provider | CiteSeerX |
|---|---|
| Author | Cho, J. Yan, J. Gregory, J. A. Eberhart, H. Peterson, R. L. Najafi, K. |
| Description | in Proc. IEEE MEMS This paper presents a novel 3-D fabrication process of microstructures using high-Q materials. The key feature of this process is the use of a blow torch that can provide intensive localized heat up to 2500 °C in a very short time (<10 sec), above the melting temperatures of many high-Q materials such as fused silica. Surface roughness of 5.3 Å is realized in fused silica, which is crucial for high optical and mechanical quality factors (Q). We demonstrate the fabrication of micro hemisphere and half-toroid (birdbath) geometries from 100µm-thick fused silica substrates. We also create micro birdbath resonators by batch-level releasing the birdbath shells and demonstrate one of the best mechanical Q and low stiffness and damping anisotropies among existing micro mechanical resonators. The birdbath resonator is promising for emerging applications such as micro rate-integrating gyroscope (µ-RIG). |
| File Format | |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Silica Substrate Micro Hemisphere Micro Rate-integrating Gyroscope Key Feature Birdbath Resonator Micro Mechanical Resonator Blow Torch Birdbath Shell Hemispherical 3-d Resonator Blow Torch Molding High-q Material Mechanical Quality Factor Short Time Surface Roughness Novel 3-d Fabrication Process Micro Birdbath Resonator Many High-q Material Low Stiffness Silica Birdbath Fused Silica |
| Content Type | Text |
| Resource Type | Article |
