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Three-Dimensional Simulation of Focused Ion Beam Processing Using the Level Set Method
| Content Provider | CiteSeerX |
|---|---|
| Author | Ertl, Otmar Selberherr, Siegfried |
| Abstract | Abstract—Three-dimensional simulations of focused ion beam milling, which use the level set method for surface evolution, are presented for the first time. This approach allows the inherent description of topological changes. The surface rates are calculated using Monte Carlo ray tracing in order to incorporate shadowing as well as redeposition. Parallelization is used to reduce the computation time. I. |
| File Format | |
| Access Restriction | Open |
| Subject Keyword | Focused Ion Beam Processing Level Set Method Three-dimensional Simulation Abstract Three-dimensional Simulation Surface Evolution Inherent Description Surface Rate Focused Ion Beam Milling Topological Change Monte Carlo Ray Computation Time |
| Content Type | Text |