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Highaccuracy CMM metrology for micro systems (2004)
| Content Provider | CiteSeerX |
|---|---|
| Author | Haitjema, H. Bos, E. J. C. Delbressine, F. L. M. |
| Description | Proc. ISMQC |
| Abstract | The increasing use of micro systems in industry combined with an ever-increasing demand for higher measurement accuracy has led to ongoing developments in the field of dimensional metrology. Recently, several measuring machines suitable for measuring micro mechanical products have been introduced to the market. This article aims to give an overview of the state-of-the-art methods for these measurement tasks. |
| File Format | |
| Publisher Date | 2004-01-01 |
| Access Restriction | Open |
| Subject Keyword | Measurement Task State-of-the-art Method Highaccuracy Cmm Metrology Micro Mechanical Product Dimensional Metrology Micro System Measurement Accuracy Ever-increasing Demand |
| Content Type | Text |
| Resource Type | Article |
