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Current Distribution On A Resistive Wafer Under Copper Deposition Kinetics (2003)
| Content Provider | CiteSeerX |
|---|---|
| Author | Chivilikhin, Sergey Uziel, L. Malyshev, Eugene |
| Description | The deposit thickness uniformity in copper metallized semiconductor wafers is adversely affected by the limited conductivity of the thin copper seed layer. The resistive substrate tends to cause the copper to plate primarily near the terminal contact at the wafer rim. Models for this ‘terminal-effect ’ have been presented in the literature for simpler electrode configurations, or for a disk electrode, using unrealistically simplified, linear electrode polarization. We present here an analytically derived model for the current distribution on a resistive disk electrode subject to Butler-Volmer kinetics, with parameters typical to copper plating. The disk is assumed suspended in a semi-infinite large pool of electrolyte and the current is fed from its circumference. The predicted current distributions are compared to numerical simulations using electrochemical computer aided design software (“Cell-Design”). It is noted that, as expected, the current distribution is more uniform when a less conductive electrolyte is used and when the electrode kinetics are inhibited. |
| File Format | |
| Language | English |
| Publisher Date | 2003-01-01 |
| Publisher Institution | Paper # 190 b, (this symposium); Proceedings of the AICHE Annual Meeting, , San-Francisco, CA |
| Access Restriction | Open |
| Subject Keyword | Wafer Rim Thin Copper Seed Layer Disk Electrode Electrode Kinetics Copper Deposition Kinetics Current Distribution Design Software Terminal Contact Semi-infinite Large Pool Limited Conductivity Resistive Wafer Resistive Substrate Tends Conductive Electrolyte Numerical Simulation Predicted Current Distribution Simpler Electrode Configuration Electrochemical Computer Deposit Thickness Uniformity Semiconductor Wafer Linear Electrode Polarization Resistive Disk Electrode Butler-volmer Kinetics |
| Content Type | Text |
| Resource Type | Article |
