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Measurement of roundness and run-out with distributed fiber-optic sensors (2009).
| Content Provider | CiteSeerX |
|---|---|
| Author | Schmitt, Robert König, Niels Mallmann, Guilherme Francisco Depiereux, Frank |
| Abstract | Abstract � The quality inspection of products poses a challenge towards existing production metrology techniques in terms of accuracy and speed, especially when it comes to inline or in-process measurements. In this terms, optical metrology proves its capabilities, in particular for sensible and fragile work pieces. For the inspection inside small spaces and cavities or for complex geometries, many optical metrology system are to inflexible or cannot be miniaturized enough. Within this work a set-up for a fiber-optic lowcoherence interferometer system is described. Due to the high degree of miniaturization of the sensing probe, the system can be used for demanding measuring tasks like roundness of small drilling holes or the run-out of shafts. Different evaluation measurement are presented, which underline the potential of the described system for highly accurate, non-contact inspection of rotational parts. based on a low-coherence interferometer with a fiber-optic fizeau-probe. 2. SYSTEM SET-UP 2.1. Fiber-optic low-coherence interferometry As described above, the measurement principle is based on low-coherence interferometry. It mainly consists of two units, whereas both are realized as interferometers, the first one in all-fiber technology (Fig. 1, top) and the second one as a Michelson-Interferometer (Fig. 1, bottom). The fiberbased Fizeau-Interferometer is used as sensing probe and encodes the measurement distance, which is then decoded in the Michelson-Interferometer. |
| File Format | |
| Publisher Date | 2009-01-01 |
| Access Restriction | Open |
| Subject Keyword | Fiber-optic Low-coherence Interferometry Fiber-optic Fizeau-probe Low-coherence Interferometer Small Space Production Metrology Technique High Degree Different Evaluation Measurement Described System Optical Metrology In-process Measurement Complex Geometry Non-contact Inspection Sensing Probe All-fiber Technology Small Drilling Hole Many Optical Metrology System Measurement Distance Fiber-optic Lowcoherence Interferometer System Quality Inspection Fragile Work Piece Measurement Principle Fiberbased Fizeau-interferometer Rotational Part Low-coherence Interferometry Second One |
| Content Type | Text |
