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Sequential batch assembly of 3-d microstructures with elastic hinges by a magnetic field.
| Content Provider | CiteSeerX |
|---|---|
| Author | Iwase, Eiji Takeuchi, Shoji Shimoyama, Isao |
| Abstract | This paper describes three-dimensional (3-D) microstructure assembly using an external magnetic field. An external magnetic field perpendicular to a substrate lifts up a hinged structure due to the shape magnetic anisotropy. Micro flap structures (4.5 µm-thick electroplated Permalloy) having 0.2 µm-thick nickel elastic hinges with various lengths and widths are bent in out-of-plane direction in a magnetic field up to 50 kA/m. The volume of magnetic material and the stiffness of the hinges determine the sensitivity to a magnetic field. As a result, we realized sequential batch assembly using the difference of the sensitivity. By way of the example, we have erected plates 600 µm × 600 µm in size. Also, structures bent at 90 and 45 degrees out of the plane have been obtained at the same time. |
| File Format | |
| Access Restriction | Open |
| Subject Keyword | External Magnetic Field Perpendicular Sequential Batch Assembly Out-of-plane Direction External Magnetic Field Various Length Microstructure Assembly M-thick Electroplated Permalloy Elastic Hinge 3-d Microstructures Magnetic Material Micro Flap Structure Shape Magnetic Anisotropy M-thick Nickel Elastic Hinge Magnetic Field Hinged Structure |
| Content Type | Text |
| Resource Type | Article |
