NDLI: Active Vibration Control and Isolation for Micro-Machined Devices

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Kim, Seong Jin Chen, Chen Flowers, George Dean, Robert
Copyright Year	2008
Abstract	Some harsh environments contain high frequency, high amplitude mechanical vibrations. Unfortunately some very useful components, such as MEMS gyroscopes, can be very sensitive to these high frequency mechanical vibrations. Passive micromachined silicon lowpass filter structures (spring-mass-damper) have been demonstrated in recent years. However, the performance of these filter structures is typically limited by low damping. This is especially true if operated in low pressure environments, which is often the optimal operating environment for the attached device that requires vibration isolation. An active micromachined vibration isolator can be realized by combining a state sensor, and electrostatic actuator and feedback electronics with the passive isolator. Using this approach, a prototype active micromachined vibration isolator is realized and used to decrease the filter Q from approximately 135 to approximately 60, when evaluated in a low pressure environment. The physical size of these active isolators is suitable for use in or as packaging for sensitive electronic and MEMS devices, such as MEMS vibratory gyros.
Sponsorship	Aerospace Division
Starting Page	657
Ending Page	664
Page Count	8
File Format	PDF
ISBN	9780791843314
DOI	10.1115/SMASIS2008-423
e-ISBN	9780791838396
Volume Number	Smart Materials, Adaptive Structures and Intelligent Systems, Volume 1
Conference Proceedings	ASME 2008 Conference on Smart Materials, Adaptive Structures and Intelligent Systems
Language	English
Publisher Date	2008-10-28
Publisher Place	Ellicott City, Maryland, USA
Access Restriction	Subscribed
Subject Keyword	Microelectromechanical systems Damping Vibration Dampers Vibration isolators Micromachining Electronics Pressure Vibration isolation Filters Feedback Packaging Vibration control Silicon Sensors Engineering prototypes Springs Electrostatic actuators
Content Type	Text
Resource Type	Article

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