NDLI: A Preliminary Study on Machinability of Polymethylmethacrylate (PMMA)/Multi-Walled Carbon Nanotube (MWCNT) Nanocomposites in Focused Ion Beam Micromachining

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Li, Pengfei Xue, Wei Kim, Dave Dae-Wook Park, Young-Bin
Copyright Year	2011
Abstract	This experimental study investigated the machinability of polymethylmethacrylate (PMMA)/multi-walled carbon nanotube (MWCNT) nanocomposites with 20 wt% MWCNTs in focused ion beam (FIB) micromachining. PMMA/MWCNT nanocomposites were fabricated using a solution casting method, in which PMMA and MWCNTs were dispersed in a solvent by ultrasonication. Microscale rectangular pockets were created on the PMMA/MWCNT nanocomposites to study the material removal mechanism in FIB. Effects of FIB input current and the ion beam overlap parameter (overlap %) on the material removal rate and geometric accuracy were studied. It was observed that the material removal rate increased with increasing input current and decreasing overlap %. Soft lithography was used to translate the ion-milled pockets on PMMA/MWCNT nanocomposites into microscale posts on polydimethylsiloxane (PDMS) for accurate measurement of the pocket geometries. A Scanning Electron Microscope (SEM) was used to investigate the characteristics of the micromachined features, nanocomposite surfaces, and replicated PDMS patterns. Our results demonstrated an effective method to produce microscale patterns on MWCNT-based nanocomposites.
Sponsorship	Manufacturing Engineering Division
Starting Page	515
Ending Page	523
Page Count	9
File Format	PDF
ISBN	9780791844311
DOI	10.1115/MSEC2011-50115
Volume Number	ASME 2011 International Manufacturing Science and Engineering Conference, Volume 2
Conference Proceedings	ASME 2011 International Manufacturing Science and Engineering Conference
Language	English
Publisher Date	2011-06-13
Publisher Place	Corvallis, Oregon, USA
Access Restriction	Subscribed
Subject Keyword	Casting Focused ion beams Nanocomposites Microscale devices Lithography Plasma desorption mass spectrometry Micromachining Machinability Scanning electron microscopes Multi-walled carbon nanotubes
Content Type	Text
Resource Type	Article

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