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| Content Provider | The American Society of Mechanical Engineers (ASME) Digital Collection |
|---|---|
| Author | Xia, Dunzhu Zhou, Bailing Wang, Shourong |
| Copyright Year | 2007 |
| Abstract | Silicon micromechanical gyroscope is an extraordinarily important micro inertial sensor, which has characteristics of little size, low cost and batch integrated production with huge market. But it now belongs to low or middle level precision angular rate sensor, so it is becoming a key problem to update this sensitivity to high level. This paper presents several key technologies to improve silicon microgyro performance from the view of micro-electro-mechanical working principle and minor signal detection of microgyro. The simulation and circuit design are well done, which results testify that these improved technologies have certain academic and practical value to update present low or middle level precision angular rate sensor. |
| Sponsorship | Nanotechnology Institute |
| Starting Page | 157 |
| Ending Page | 160 |
| Page Count | 4 |
| File Format | |
| ISBN | 0791842657 |
| DOI | 10.1115/MNC2007-21543 |
| e-ISBN | 0791837947 |
| Volume Number | First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B |
| Conference Proceedings | 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems |
| Language | English |
| Publisher Date | 2007-01-10 |
| Publisher Place | Sanya, Hainan, China |
| Access Restriction | Subscribed |
| Subject Keyword | Silicon Sensors Signals Circuit design Simulation |
| Content Type | Text |
| Resource Type | Article |
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