NDLI: Performance Characteristics of a Variable Density Pin Array Micro-Heat Exchanger

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Performance Characteristics of a Variable Density Pin Array Micro-Heat Exchanger

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Papadopoulos, George Tiliakos, Nicholas Benel, Gabriel
Copyright Year	2011
Abstract	The design, fabrication and preliminary performance of a variable density pin array micro heat exchanger for micro-cooling applications is reported. Various pin diameters and density configurations were analyzed for their ability to provide maximum uniform heat transfer over the active area of the micro-heat exchanger using air as the working fluid for maximum mass flow rates through the micro-heat exchanger in the range of 40 mg/sec to 60 mg/sec. Fabrication of the micro-heat exchanger was performed using deep reactive ion etching (DRIE) technique on a 0.5 mm thick silicon wafer with nominal feature sizes in the range of 5 microns to 20 microns. Performance data is presented based on analysis and comparison to a baseline configuration with no pins.
Starting Page	1037
Ending Page	1044
Page Count	8
File Format	PDF
ISBN	9780791854921
DOI	10.1115/IMECE2011-62888
Volume Number	Volume 6: Fluids and Thermal Systems; Advances for Process Industries, Parts A and B
Conference Proceedings	ASME 2011 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2011-11-11
Publisher Place	Denver, Colorado, USA
Access Restriction	Subscribed
Subject Keyword	Reactive-ion etching Cooling Pins (engineering) Semiconductor wafers Heat exchangers Density Flow (dynamics) Performance characterization Design Heat Fluids Manufacturing Heat transfer
Content Type	Text
Resource Type	Article

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