NDLI: Design of a High-Bandwidth XY Nanopositioning Stage for High-Throughput Micro/Nano Manufacturing

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Polit, Sebastian Dong, Jingyan
Copyright Year	2010
Abstract	A high natural frequency (open-loop bandwidth) is a critical requirement for nanopositioners in high-throughput nanomanufacturing and nano-metrology applications. This paper presents the design and analysis of a high-bandwidth nanopositioning XY stage. The monolithic stage design has two axes and each axis is comprised of a doubly-clamped beam and a parallelogram hybrid flexure with complaint beams and circular flexure hinges. The doubly-clamped beam that is actuated by a piezoelectric actuator acts as a linear prismatic axis. The parallelogram hybrid flexures are used to decouple the actuation effect from the other axis. The mechanism design decouples the motion in the X and Y directions and restricts parasitic rotations in the XY plane while allowing for an increased bandwidth with linear kinematics in the operating region (or workspace). Kinematic and dynamic analysis shows that the mechanical structure of the stage has decoupled motion in XY direction, while achieving high bandwidth and good linearity. Finite element analysis is adapted to verify the dynamic responses from theoretical analysis. The stage is actuated by piezoelectric stack actuators, and two capacitive gauges were added to the system to build a closed-loop positioning system. The results from frequency test show that the resonation frequencies of the two vibrational modes are over 8K Hz. The stage is capable of about 15 microns of motion along each axis with a resolution of about 1 nanometer. Due to parallel kinematic mechanism design, a uniform performance is achieved across the workspace. A PI controller is implemented for the stage and a high closed-loop bandwidth is obtained.
Starting Page	709
Ending Page	718
Page Count	10
File Format	PDF
ISBN	9780791844274
DOI	10.1115/IMECE2010-37794
Volume Number	Volume 3: Design and Manufacturing, Parts A and B
Conference Proceedings	ASME 2010 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2010-11-12
Publisher Place	Vancouver, British Columbia, Canada
Access Restriction	Subscribed
Subject Keyword	Flexure stage Parallel kinematic mechanism Nanopositioning Piezoelectric actuator Dynamic response Actuators Bending (stress) Dynamic analysis Control equipment Theoretical analysis Gages Design Hinges Nanomanufacturing Mechanical structures Kinematics Piezoelectric actuators Vibrational modes Metrology Finite element analysis Resolution (optics)
Content Type	Text
Resource Type	Article

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