NDLI: Experimental Investigation of Pulsed Laser Deposition Based on a Compressible Flow Framework

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Sheng, Biqing Zhang, Zhaoyan
Copyright Year	2006
Abstract	Pulsed laser deposition (PLD) is a popular technique for creating thin films. The film characteristics are directly related to the kinetic energy of the laser-induced plume. According to the theory of transient shock wave expansion during laser ablation, laser-induced plume properties are strongly affected by laser intensity as well as ambient temperature, pressure, and gas species. This theory leads to the development of PLD strategies to properly optimize the PLD parameters. The experiments were carried out to deposit diamond-like carbon (DLC) thin films under different ambient temperature, pressure and gas species. The deposited DLC thin films were characterized by Raman spectroscopy. Experimental results showed that the thin film quality can be improved by decreasing the ambient temperature, increasing the ambient pressure and using ambient gases with low molecular weight. Experimental results agree well with the theoretical prediction.
Sponsorship	Materials Division, Nondestructive Evaluation Division, and Pressure Vessels and Piping Division
Starting Page	7
Ending Page	11
Page Count	5
File Format	PDF
ISBN	079184773X
DOI	10.1115/IMECE2006-14219
e-ISBN	0791837904
Volume Number	Materials, Nondestructive Evaluation, and Pressure Vessels and Piping
Conference Proceedings	ASME 2006 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2006-11-05
Publisher Place	Chicago, Illinois, USA
Access Restriction	Subscribed
Subject Keyword	Temperature Plumes (fluid dynamics) Diamonds Pulsed laser deposition Laser ablation Raman spectroscopy Pressure Carbon Molecular weight Transients (dynamics) Thin films Gases Shock waves Lasers Kinetic energy Compressible flow
Content Type	Text
Resource Type	Article

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