NDLI: Laser-Based Fabrication of Polymer Micro-Fluidic Devices

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Kim, Joohan Xu, Xianfan
Copyright Year	2004
Abstract	Micro-fluidic devices have many applications such as clinical diagnostics, drug delivery, and microelectronics cooling. So far, most micro-fluidic devices are fabricated using the well established photo-lithography process. In this paper, we present laser-based techniques for fabricating polymer micro-fluidic devices. Advantages using polymers as a material for micro-fluidic applications are discussed. A UV excimer laser and a femtosecond laser are used to machine polymer micro-fluidic structures directly. This direct machining process suits the need of rapid prototyping, as in many applications changes from the original design are often required. As examples, two polymer micro-systems are developed: a micro-check valve and a micro diffuser pump. Further, a micro stamping process for rapid replication is also developed. A photoetchable glass-ceramic stamp is utilized for this process and several polymer-micro devices are fabricated using this process.
Sponsorship	Microelectromechanical Systems Division
Starting Page	293
Ending Page	298
Page Count	6
File Format	PDF
ISBN	0791847144
DOI	10.1115/IMECE2004-62025
Volume Number	Microelectromechanical Systems
Conference Proceedings	ASME 2004 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2004-11-13
Publisher Place	Anaheim, California, USA
Access Restriction	Subscribed
Subject Keyword	Microelectromechanical systems Drug delivery systems Cooling Glass Machining Microelectronic devices Valves Ceramics Machinery Design Ultraviolet radiation Metal stamping Lasers Pumps Rapid prototyping Diffusers Excimer lasers Manufacturing Polymers Photolithography Microfluidics
Content Type	Text
Resource Type	Article

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