NDLI: Thin YSZ Electrolyte Film Depositions on Dense and Porous Substrates

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Xu, Zhigang Hilton, Corydon Watkins, Bobby Yarmolenko, Sergey Sankar, Jag
Copyright Year	2003
Abstract	Yttria stabilized zirconia (YSZ) thin films have been processed on polished silicon and porous strontium-doped lanthanum manganite (LSM) substrates by liquid fuel combustion chemical vapor deposition from combustion of an aerosol jet. The aerosol jet consists of Y- and Zr- containing metalorganics dissolved in toluene and high-purity oxygen. The morphology and thickness of the deposited films have been analyzed with scanning electron microscope. On the polished silicon substrates, thin and uniform films have been obtained. The grain growth rate is of the first order of the deposition time. The film growth rate was greatly enhanced by utilizing higher precursor concentrations, proper substrate temperature and the effect of thermophoresis. However, when the porous substrate is being coated, a more complex deposition process takes place. The initial deposition seems to be favored on the surface protrusions. Therefore, the covered areas serve as nucleation sites and the grains start to grow, giving rise to larger particles and rougher surface than the films on polished silicon. To enhance the pore-sealing rate, some pre-treatments and post-treatment have been used. Moreover, deposition parameters towards fast pore sealing have been investigated. Thin and continuous films with the film thickness less than 3 μm have been obtained.
Sponsorship	Materials Division
Starting Page	343
Ending Page	348
Page Count	6
File Format	PDF
ISBN	079183719X
DOI	10.1115/IMECE2003-43330
Volume Number	Materials
Conference Proceedings	ASME 2003 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2003-11-15
Publisher Place	Washington, DC, USA
Access Restriction	Subscribed
Subject Keyword	Oxygen Temperature Sealing (process) Polishing Combustion Scanning electron microscopes Film thickness Fuels Chemical vapor deposition Nucleation (physics) Strontium Thin films Zirconium Particulate matter Aerosols Electrolytes Silicon Lanthanum
Content Type	Text
Resource Type	Article

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