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| Content Provider | The American Society of Mechanical Engineers (ASME) Digital Collection |
|---|---|
| Author | Hu, Xuejiao Jain, Ankur Kenneth, E. Goodson |
| Copyright Year | 2005 |
| Abstract | Heat loss through surrounding air has important thermal effect on microfabricated structures. This effect is generally modeled as a natural convection boundary condition. However, how to determine the convective coefficient (h) at microscales is a debate. In this paper, a micro heater is fabricated on a suspended thin film membrane. The natural convection is investigated using the 3-omega measurements and complex analytical modeling. It is found that h seems larger than that at larger scales; however, it is also proved that the increased h is actually contributed by heat conduction instead of heat convection. A method of determining the phenomenal h that can be used for microfabricated structures is proposed by using the heat conduction shape factor. |
| Sponsorship | Heat Transfer Division and Electronic and Photonic Packaging Division |
| Starting Page | 641 |
| Ending Page | 644 |
| Page Count | 4 |
| File Format | |
| ISBN | 0791847314 |
| DOI | 10.1115/HT2005-72698 |
| e-ISBN | 0791837629 |
| Volume Number | Heat Transfer: Volume 1 |
| Conference Proceedings | ASME 2005 Summer Heat Transfer Conference collocated with the ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems |
| Language | English |
| Publisher Date | 2005-07-17 |
| Publisher Place | San Francisco, California, USA |
| Access Restriction | Subscribed |
| Subject Keyword | Heat conduction Thin films Membranes Temperature effects Heat losses Boundary-value problems Natural convection Shapes Modeling Convection |
| Content Type | Text |
| Resource Type | Article |
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