NDLI: Parameter Varying Control of an Electrostatic MEMS Actuator

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Farzad, A. Shirazi Mohammadpour, Javad Karolos, M. Grigoriadis
Copyright Year	2009
Abstract	The present paper employs a linear parameter-varying (LPV) control design approach with H∞ performance specification for set-point tracking of deflection in an electrostatic MEMS actuator. First, we model the system dynamics in an LPV framework, considering the actuation charge as the scheduling parameter. Then, we design an H∞ parameter-dependant state feedback controller, where its static gain is scheduled based on the LPV parameter. The states of the modeled LPV system are estimated using an LPV observer whose design is addressed in the paper. The simulation results presented in the paper provide asymptotic stability and desired performance against pull-in effect and vibration disturbance. Also the performance of the LPV controller is compared with a fixed H∞ controller to demonstrate that the LPV controller provides smaller settling time, lower overshoot and hence improved transient and steady-state performance over full range of device operation.
Sponsorship	Dynamic Systems and Control Division
Starting Page	809
Ending Page	816
Page Count	8
File Format	PDF
ISBN	9780791848937
DOI	10.1115/DSCC2009-2663
e-ISBN	9780791838600
Volume Number	ASME 2009 Dynamic Systems and Control Conference, Volume 2
Conference Proceedings	ASME 2009 Dynamic Systems and Control Conference
Language	English
Publisher Date	2009-10-12
Publisher Place	Hollywood, California, USA
Access Restriction	Subscribed
Subject Keyword	Microelectromechanical systems Design Actuators State feedback Simulation results Stability System dynamics Vibration Deflection Control equipment Steady state Transients (dynamics)
Content Type	Text
Resource Type	Article

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