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| Content Provider | The American Society of Mechanical Engineers (ASME) Digital Collection |
|---|---|
| Author | Sami, A. Alkharabsheh Mohammad, I. Younis |
| Copyright Year | 2011 |
| Abstract | We present an investigation into the dynamics of MEMS arches when actuated electrically including the effect of their flexible (non-ideal) supports. First, the eigenvalue problem of a nonlinear Euler-Bernoulli shallow arch with torsional and transversal springs at the boundaries is solved analytically. Several results are shown to demonstrate the possibility of tuning the theoretically obtained natural frequencies of an arch to match the experimentally measured. Then, simulation results are shown for the forced vibration response of an arch when excited by a DC electrostatic force superimposed to an AC harmonic load. Shooting technique is utilized to find periodic motions. The stability of the captured periodic motion is examined using the Floquet theory. The results show several jumps in the response during snap-through motion and pull-in. Theoretical and experimental investigations are conducted on a microfabricated curved beam actuated electrically. Results show softening behavior and superharmonic resonances. It is demonstrated that non-ideal boundary conditions can have significant effect on the qualitative dynamical behavior of the MEMS arch, including its natural frequencies, snap-through behavior, and dynamic pull-in. |
| Sponsorship | Design Engineering Division and Computers and Information in Engineering Division |
| Starting Page | 197 |
| Ending Page | 207 |
| Page Count | 11 |
| File Format | |
| ISBN | 9780791854846 |
| DOI | 10.1115/DETC2011-48501 |
| Volume Number | Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference |
| Conference Proceedings | ASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference |
| Language | English |
| Publisher Date | 2011-08-28 |
| Publisher Place | Washington, DC, USA |
| Access Restriction | Subscribed |
| Subject Keyword | Microelectromechanical systems Dynamics of mems Simulation results Stability Vibration Arches Eigenvalues Boundary-value problems Resonance Springs Stress |
| Content Type | Text |
| Resource Type | Article |
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