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| Content Provider | The American Society of Mechanical Engineers (ASME) Digital Collection |
|---|---|
| Author | Lajimi, S. A. M. Heppler, G. R. |
| Copyright Year | 2010 |
| Abstract | This work aims at developing a new nonlinear control scheme based on control Lyapunov functions combined with backstepping to stabilize parallel-plate electrostatic MEMS actuators. Parallel-plate electrostatic MEMS actuators are not linearly controllable at the origin due to a strong non-linearity which comes from electrostatic forces. In the present study, a robust method is used to derive a new controller to thoroughly remove the instability region, and minimize the possibility of hitting the fixed electrode by the moveable plate. A large number of numerical simulations are performed to verify the analytical model. The resulting parallel-plate microactuator system shows no region of instability using the proposed controller. A comparison shows the robustness of the method in comparison with other solutions, and demonstrates a significant improvement in performance. |
| Sponsorship | Design Engineering Division and Computers in Engineering Division |
| Starting Page | 777 |
| Ending Page | 784 |
| Page Count | 8 |
| File Format | |
| ISBN | 9780791844120 |
| DOI | 10.1115/DETC2010-28956 |
| e-ISBN | 9780791838815 |
| Volume Number | Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems |
| Conference Proceedings | ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference |
| Language | English |
| Publisher Date | 2010-08-15 |
| Publisher Place | Montreal, Quebec, Canada |
| Access Restriction | Subscribed |
| Subject Keyword | Microelectromechanical systems Electrodes Actuators Computer simulation Control equipment Microactuators Robustness |
| Content Type | Text |
| Resource Type | Article |
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