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| Content Provider | The American Society of Mechanical Engineers (ASME) Digital Collection |
|---|---|
| Author | Koitzsch, Matthias Mattes, Andreas Schellenberger, Martin Pfitzner, Lothar Frey, Lothar |
| Copyright Year | 2009 |
| Abstract | An innovative approach for the integrated and virtual development of new semiconductor manufacturing equipment is presented in this paper: Virtual Equipment Engineering (VEE). This new concept allows for the intelligent coupling of CAD with existing and novel simulation methods of the equipment development process towards a flexibly configurable integrated system. The main objective of VEE is to forecast the influence of development measures on the process and on the final device characteristics in the very early development stages of new equipment. Therefore, VEE follows a holistic view on equipment and processes to offer an integrated and adaptable development environment and a consistent simulation of equipment, process, process chain, and final devices. The major challenge in realizing this approach is the provision of a continuous, consistent, and persistent simulation chain. One possible solution dealing with this challenge is being developed and presented in this paper. |
| Sponsorship | Design Engineering Division and Computers in Engineering Division |
| Starting Page | 541 |
| Ending Page | 547 |
| Page Count | 7 |
| File Format | |
| ISBN | 9780791848999 |
| DOI | 10.1115/DETC2009-86724 |
| e-ISBN | 9780791838563 |
| Volume Number | Volume 2: 29th Computers and Information in Engineering Conference, Parts A and B |
| Conference Proceedings | ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference |
| Language | English |
| Publisher Date | 2009-08-30 |
| Publisher Place | San Diego, California, USA |
| Access Restriction | Subscribed |
| Subject Keyword | Integrated development Computer aided engineering integration Virtual development Persistent simulation chain Computer aided design Integration of design and calculation Design Chain Computer-aided engineering Simulation Integrated systems Integrated circuit fabrication Computer-aided design |
| Content Type | Text |
| Resource Type | Article |
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