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| Content Provider | The American Society of Mechanical Engineers (ASME) Digital Collection |
|---|---|
| Author | Gao, Feng Hong, Y. Steve Sarma, Radha |
| Abstract | Lacking proper geometric design capability is one of the main factors that are impeding MEMS development. MEMS developers are suffering the cumbersome and unintuitive traditional design methodology in which the design of a new product begins with figuring out its fabrication mask layouts. As the kernel of new MEMS design methodology, a new model for MEMS devices is highly required to implement structured design strategies. This paper focuses on developing a feature model for MEMS geometric design, which enables designers to create fabrication-ready 3D models of MEMS devices in an intuitive manner. This feature model not only represents the geometric information of the devices but also provides the high level engineering means to describe the design intent, and hence, it can be used to facilitate the decision making process in design and the modification of models in subsequent stages. The separation of design and fabrication allows designers to concentrate on creative design activity without thinking of the tedious fabrication issues. The features specified according to common fabrication process aim to systematically map design intents to fabrication data. A generalized framework for MEMS feature model is presented in which the features are manipulated and managed in a declarative manner. |
| Sponsorship | Design Engineering Division and Computers and Information in Engineering Division |
| Starting Page | 149 |
| Ending Page | 158 |
| Page Count | 10 |
| File Format | |
| ISBN | 0791836991 |
| DOI | 10.1115/DETC2003/CIE-48186 |
| e-ISBN | 0791836983 |
| Volume Number | Volume 1: 23rd Computers and Information in Engineering Conference, Parts A and B |
| Conference Proceedings | ASME 2003 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference |
| Language | English |
| Publisher Date | 2003-09-02 |
| Publisher Place | Chicago, Illinois, USA |
| Access Restriction | Subscribed |
| Content Type | Text |
| Resource Type | Article |
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