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Acoustic Resonator Device with At Least One Air-ring and Frame
| Content Provider | The Lens |
|---|---|
| Abstract | An acoustic resonator device includes a bottom electrode disposed on a substrate over an air cavity, a piezoelectric layer disposed on the bottom electrode, and a top electrode disposed on the piezoelectric layer, where an overlap between the top electrode, the piezoelectric layer and the bottom electrode over the air cavity defines a main membrane region. The acoustic resonator device further includes at least one air-ring defining a boundary of the main membrane region, and at least one first frame formed between the bottom electrode and the piezoelectric layer or formed between the substrate and the bottom electrode, and a second frame formed between the piezoelectric layer and the top electrode. |
| Related Links | https://www.lens.org/lens/patent/013-282-631-247-879/frontpage |
| Language | English |
| Publisher Date | 2017-02-14 |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Patent |
| Jurisdiction | United States of America |
| Date Applied | 2014-02-27 |
| Applicant | Avago Tech Wireless Ip (singapore) Pte Ltd Avago Technologies General Ip |
| Application No. | 201414192599 |
| Claim | An acoustic resonator device, comprising: a bottom electrode disposed on a substrate over an air cavity; a piezoelectric layer disposed on the bottom electrode; a top electrode disposed on the piezoelectric layer, an overlap between the top electrode, the piezoelectric layer and the bottom electrode over the air cavity including a main membrane region; at least one air-ring having an inside boundary defining an outside boundary of the main membrane region; and a first frame formed between the bottom electrode and the piezoelectric layer, wherein the at least one air-ring includes a bottom air-ring formed between the bottom electrode and the piezoelectric layer. The acoustic resonator device of claim 1 , wherein the first frame has an inner edge defining a boundary of an active region formed within the main membrane region. The acoustic resonator device of claim 2 , wherein the first frame comprises an add-on frame formed on a top surface of the bottom electrode. The acoustic resonator device of claim 2 , wherein the first frame comprises a composite frame formed within the bottom electrode. The acoustic resonator device of claim 2 , further comprising: a second frame formed between the piezoelectric layer and the top electrode, the second frame having an inner edge substantially aligned with the boundary of the active region formed within the main membrane region. The acoustic resonator device of claim 2 , further comprising: a second frame formed between the piezoelectric layer and the top electrode, wherein the inner edge of the first frame extends further into the main membrane region than an inner edge of the second frame. The acoustic resonator device of claim 1 , wherein the at least one air-ring further includes a top air-ring comprising an air-bridge and an air-wing formed between the piezoelectric layer and the top electrode. The acoustic resonator device of claim 7 , wherein at least one of the top air-ring and the bottom air-ring defining the outside boundary of the main membrane region. The acoustic resonator device of claim 8 , further comprising: a second frame formed between the piezoelectric layer and the top electrode. The acoustic resonator device of claim 1 , further comprising: a second frame formed between the piezoelectric layer and the top electrode, wherein the second frame has an inner edge defining a boundary of an active region formed within the main membrane region, and wherein the inner edge of the second frame extends further into the main membrane region than an inner edge of the first frame. An acoustic resonator device, comprising: a bottom electrode disposed on a substrate over an air cavity; a piezoelectric layer disposed on the bottom electrode; a top electrode disposed on the piezoelectric layer, an overlap between the top electrode, the piezoelectric layer and the bottom electrode over the air cavity including a main membrane region; at least one air-ring having an inside boundary defining an outside boundary of the main membrane region; and a first frame formed below the bottom electrode, between the substrate and the bottom electrode, and extending into a portion of the air cavity. The acoustic resonator device of claim 11 , wherein the first frame has an inner edge defining a boundary of an active region formed within the main membrane region. The acoustic resonator device of claim 12 , further comprising: a second frame formed between the piezoelectric layer and the top electrode, the second frame having an inner edge substantially aligned with the boundary of the active region formed within the main membrane region. The acoustic resonator device of claim 11 , wherein the at least one air-ring includes a top air-ring comprising an air-bridge and an air-wing formed between the piezoelectric layer and the top electrode. The acoustic resonator device of claim 14 , wherein the at least one air-ring further includes a bottom air-ring formed between the bottom electrode and the piezoelectric layer, at least one of the top air-ring and the bottom air-ring defining the outside boundary of the main membrane region. The acoustic resonator device of claim 15 , further comprising: a second frame formed between the piezoelectric layer and the top electrode. The acoustic resonator device of claim 11 , wherein the at least one air-ring includes a bottom air-ring formed between the bottom electrode and the piezoelectric layer. The acoustic resonator device of claim 11 , further comprising: a second frame formed between the piezoelectric layer and the top electrode, wherein one of an inner edge of the first frame and an inner edge of the second frame that extends further into the main membrane region defines a boundary of an active region formed within the main membrane region. An acoustic resonator device, comprising: a bottom electrode disposed on a substrate over an air cavity; a piezoelectric layer disposed on the bottom electrode and doped with at least one rare earth element; a top electrode disposed on the piezoelectric layer, an overlap between the top electrode, the piezoelectric layer and the bottom electrode over the air cavity including a main membrane region; an air-ring having an inside boundary defining a boundary of the main membrane region and located between the piezoelectric layer and the top electrode; a first frame formed between the bottom electrode and the piezoelectric layer; and a second frame formed between the piezoelectric layer and the top electrode, wherein an active region is formed within the main membrane region, and a boundary of the active region is defined by at least one of an inner edge of the first frame and an inner edge of the second frame. An acoustic resonator device, comprising: a bottom electrode disposed on a substrate over an air cavity; a piezoelectric layer disposed on the bottom electrode; a top electrode disposed on the piezoelectric layer, an overlap between the top electrode, the piezoelectric layer and the bottom electrode over the air cavity including a main membrane region; at least one air-ring having an inside boundary defining an outside boundary of the main membrane region; a first frame formed between the bottom electrode and the piezoelectric layer; and a second frame formed between the piezoelectric layer and the top electrode, wherein one of a first inner edge of the first frame and a second inner edge of the second frame that extends further into the main membrane region defines a boundary of an active region formed within the main membrane region. |
| CPC Classification | IMPEDANCE NETWORKS; e.g. RESONANT CIRCUITS;RESONATORS |
| Examiner | Barbara Summons |
| Extended Family | 099-624-057-931-058 152-029-432-442-680 005-895-596-133-930 069-612-967-979-679 042-262-564-901-853 162-757-065-096-154 162-318-628-017-890 199-037-669-517-287 164-977-315-229-667 171-050-578-053-819 161-419-510-097-801 004-915-297-941-507 150-013-693-073-319 006-618-556-625-720 118-863-381-557-462 007-857-979-185-370 078-996-649-930-724 104-911-668-013-601 106-338-199-006-671 099-233-954-753-222 138-897-185-189-763 169-367-990-566-089 038-843-906-671-295 194-472-763-617-668 025-701-692-008-547 015-996-238-372-881 048-690-729-596-607 173-372-969-639-328 185-488-395-998-427 170-071-079-201-545 199-979-952-773-779 193-318-176-449-995 062-271-289-035-056 043-804-098-656-351 150-538-231-234-44X 080-992-488-217-621 128-559-535-202-039 129-163-890-725-243 184-390-757-924-571 021-586-860-208-26X 193-616-352-181-568 131-391-943-991-921 001-780-707-196-85X 149-224-444-792-501 193-604-131-390-771 149-392-303-374-480 169-259-547-677-827 018-784-683-579-738 162-944-974-492-545 139-970-673-241-676 144-427-872-308-868 014-802-761-189-77X 013-282-631-247-879 118-856-571-269-001 190-117-456-891-34X 141-767-047-618-083 155-543-665-094-964 076-139-119-859-650 167-743-882-373-566 024-422-179-534-978 188-359-215-678-134 133-015-785-607-878 130-385-160-620-350 127-290-274-648-191 102-693-474-374-112 062-045-577-534-030 045-795-385-983-700 005-767-628-409-22X 166-566-809-012-499 031-744-490-455-83X 030-296-271-332-562 149-449-184-406-885 052-534-486-421-078 014-872-839-536-465 088-402-774-485-561 019-220-654-718-973 174-520-080-004-238 086-245-529-019-293 111-127-246-728-02X 019-020-373-130-288 |
| Patent ID | 9571064 |
| Inventor/Author | Burak Dariusz Nikkel Phil Shirakawa Alexandre Augusto |
| IPC | H03H9/15 H03H3/04 H03H9/02 H03H9/13 H03H9/17 H03H9/54 |
| Status | Active |
| Owner | Avago Technologies General Ip (singapore) Pte. Ltd Avago Technologies International Sales Pte. Limited |
| Simple Family | 013-282-631-247-879 170-071-079-201-545 |
| CPC (with Group) | H03H9/173 H03H3/04 H03H9/02007 H03H9/132 H03H9/02086 H03H9/02118 H03H9/54 |
| Issuing Authority | United States Patent and Trademark Office (USPTO) |
| Kind | Patent/New European patent specification (amended specification after opposition procedure) |
