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Phase Change Material Source for Physical Vapor Deposition
| Content Provider | The Lens |
|---|---|
| Abstract | A method and apparatus for manufacturing electrochemical cells. The apparatus and method includes the modification of solid phase material used in electrochemical cells, such as batteries, into a viscous phase for ease of metering and dispensing onto a hot wall reactor to create a substantially uniform cloud of vapor to be deposited on a substrate or other stacks of cells in a continuous or semi-continuous process and having the useful advantage of depositing large volumes of materials for economical manufacturing. |
| Related Links | https://www.lens.org/lens/patent/010-833-495-908-140/frontpage |
| Language | English |
| Publisher Date | 2017-07-06 |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Patent |
| Jurisdiction | United States of America |
| Date Applied | 2017-02-28 |
| Applicant | Sakti3 Inc |
| Application No. | 201715445740 |
| Claim | (canceled) A vapor deposition apparatus for manufacturing electrochemical cells, the apparatus comprising: an evaporation region comprising a hot wall reactor comprising a spinning disc, the hot wall reactor configured to deliver deposition material to an electrochemical cell substrate; and a delivery device comprising a delivery tube, the delivery tube configured to deliver deposition material to the spinning disc of the hot wall reactor of the vapor deposition apparatus. The apparatus of claim 2 , wherein the delivery tube is heated. The apparatus of claim 2 , wherein the spinning disc is heated. The apparatus of claim 2 , wherein the spinning disc comprises one or more of carbon, titanium, stainless steel, Incoloy, Inconel, tantalum, tungsten, vanadium, and molybdenum. The apparatus of claim 2 , wherein the spinning disc comprises a scraping element configured to scrape a surface of the spinning disc. The apparatus of claim 2 , wherein the delivery tube comprises a spray nozzle or a solenoid for forming droplets or vaporized mist of deposition material on a surface of the spinning disc. The apparatus of claim 2 , wherein the delivery device is coupled to a mechanical linear drive. The apparatus of claim 2 , wherein the delivery device comprises a feedback loop to control one or more of a temperature, a mass flow, and a film thickness. The apparatus of claim 2 , wherein the delivery device comprises a deposition source material container configured to contain deposition source materia The apparatus of claim 10 , wherein the delivery device comprises a heating element configured to transfer heat to a lower portion of the deposition source material container. The apparatus of claim 10 , wherein the deposition source material container comprises a weight for providing a constant force to the deposition source materia The apparatus of claim 10 , wherein the deposition source material in the deposition source material container comprises a solid material portion and at least one of a liquid or gaseous material portion. The apparatus of claim 13 , wherein the solid material portion is in contact with the at least one of a liquid or gaseous material portion of the deposition source material container. The apparatus of claim 13 , wherein the solid material portion of the deposition source material container comprises a solid source material comprising lithium. The apparatus of claim 13 , wherein the solid material portion of the deposition source material container comprises a solid source material comprising meta A delivery device for a vapor deposition apparatus comprising: a deposition source material container configured to contain a deposition source material; a heating element configured to transfer heat to a lower portion of the deposition source material container; and a delivery tube configured to deliver the deposition source material to an evaporation region of the vapor deposition apparatus. The device of claim 17 , wherein the delivery tube is heated. The device of claim 17 , comprising a feedback loop to control one or more of a temperature, a mass flow, and a film thickness. The device of claim 17 , comprising a weight for providing a constant force to the deposition source material in the deposition source material container. The device of claim 17 , wherein the device is coupled to a mechanical linear drive. The device of claim 17 , wherein the deposition source material in the deposition source material container comprises a solid material portion and at least one of a liquid or gaseous material portion. The device of claim 22 , wherein the solid material portion is in contact with the at least one of a liquid or gaseous material portion of the deposition source material container. The device of claim 22 , wherein the solid material portion of the deposition source material container comprises a solid source material comprising lithium. The device of claim 22 , wherein the solid material portion of the deposition source material container comprises a solid source material comprising meta |
| CPC Classification | COATING METALLIC MATERIAL;COATING MATERIAL WITH METALLIC MATERIAL;SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE; BY CHEMICAL CONVERSION OR SUBSTITUTION;COATING BY VACUUM EVAPORATION; BY SPUTTERING; BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION; IN GENERAL Processes Or Means; E.G. Batteries; For The Direct Conversion Of Chemical Energy Into Electrical Energy Reduction Of Greenhouse Gas [Ghg] Emissions; Related To Energy Generation; Transmission Or Distribution Climate Change Mitigation Technologies In The Production Or Processing Of Goods Climate Change Mitigation Technologies Related To Transportation |
| Extended Family | 064-510-496-487-467 125-803-012-691-69X 010-833-495-908-140 165-750-248-010-904 |
| Patent ID | 20170194624 |
| Inventor/Author | Sastry Ann Marie Chung Myoungdo Kim Hyoncheol |
| IPC | H01M4/04 C23C14/14 C23C14/24 C23C14/50 C23C14/54 C23C14/58 H01M4/1395 |
| Status | Active |
| Simple Family | 064-510-496-487-467 125-803-012-691-69X 010-833-495-908-140 165-750-248-010-904 |
| CPC (with Group) | C23C14/042 C23C14/082 C23C14/14 C23C14/246 C23C14/26 H01M4/0421 H01M4/1395 H01M10/052 H01M10/058 Y02E60/10 Y02P70/50 H01M4/0423 C23C14/243 C23C14/505 C23C14/542 C23C14/588 H01M4/0471 Y02T10/70 |
| Issuing Authority | United States Patent and Trademark Office (USPTO) |
| Kind | Patent Application Publication |
